Planar Magnetron Sputter Gun For Vacuum Deposition in Ottawa

Planar Magnetron Sputter Gun For Vacuum Deposition

In the vacuum sputtering coating of electronic devices, precious metals such as gold and silver are often required. Ordinary magnetron cathode sputtering has a wider target material and higher cost. To reduce the cost of target materials, the width of the cathode should be designed as narrow as possible, less than 60mm. Using neodymium iron boron magnets for magnetic field equipment, the parallel magnetic field on the target surface reaches 400 Gauss or more.

Small planar magnetron sputtering cathode of noble metal is a kind of small planar cathode which is used to carry noble metal target (such as gold, silver, platinum, etc.) To be sputtered and can produce magnetron sputtering effect in vacuum sputtering equipment. Its main function is to increase the sputtering rate by introducing a magnetic field and using the confinement of the magnetic field to the charged particles to improve the plasma density, so that the noble metal target can be sputtered onto the substrate in the form of high-energy bombardment to form the required film.

Structure of the sputtering cathode
Planar magnetron sputter cathode mainly comprises that follow parts:
Anode: Commonly known as a shield, it is used to protect the cathode and target from unwanted sputtering and contamination.
Cathode module: including target layering, diaphragm layering, diaphragm plate, cathode body, etc, used to fix and support the target and ensure the stability of the sputtering process.
Magnetic circuit module: It is composed of magnetic steel and magnetic yoke, which is used to generate the required magnetic field to restrain and accelerate charged particles.
Gas distribution system: It is used to introduce inert gas (such as argon) into the vacuum chamber to provide the atmosphere required for sputtering.
Mounting flange: used to fix the cathode on the vacuum sputtering equipment.
Water, electricity and gas cathode shell external system: used to connect cooling water, power supply and gas pipelines to ensure the normal operation of the cathode.

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